MIPOS Objective Positioners

PSJ Mipos objective positioner 400

The MIPOS series of objective positioners can increase the quality and resolution (sub-nanometer) of sample imaging in critical processes such as semiconductor manufacturing, life sciences research, and general microscopy applications. There are 8 unique models, and custom OEM variants requests are welcome.  The positioners use a parallelogram design using flexure hinges to deliver high position repeatability and minimal lateral run-out in the non-moving axis.

Focus range varies from 16 to 800 µm based on model.  Open and closed-loop models are available. Some models can also be used upside-down for use with inverse microscopes.  The positioners are easy to attach to all standard microscope brands using thread adapters which are available for Zeiss, Leica, Nikon, Olympus etc. microscopy systems.

MIPOS positioners offer plug & play operation with the recommended NV200/D digital controller that includes the NEW PiSoWorks 2.0 software. 

2025 MIPOS Objective Positioners Brochure

Available Models:

PSJ MIPOS 100

MIPOS 100

This positioner offers:

  • 100 µm focusing range
  • Inverted-use models available
  • High resonant frequency
  • Easy to attach on microscopes
  • Optional feedback sensor

The objective lens positioning MIPOS 100 was developed for finely adjusting micro objectives and object lenses. The maximum motion is 100µm. The resolution of the MIPOS 100 is very high, and in practice only limited by the voltage noise of the power supply.

Mounting this system onto a microscope is very easy – screw the Flex-Adapter thread ring onto the microscope and mount the lens positioning system on this ring with the screw. Because of the small size, no other threads are blocked.

A special inverted model available enables to work in an upside down (UD) position on inverted microscopes. These MIPOS systems are designated by “UD”.

To avoid drift and hysteresis, the MIPOS is also available with an integrated strain gauge measurement system (“SG”). “PL” versions are pre-loaded.

To request the Full Datasheet use the button below.  Your requested product(s) will be added to the Contact Form below which you then can submit.

PSJ MIPOS 250 Objective Positioner

MIPOS 250

This positioner offers:

  • 250 µm focusing range
  • Open-loop 0.5 nm resolution
  • High resonant Frequency
  • Flexible use via Flex-Adapter
  • Optional integrated measurement system

The piezo focus positioner MIPOS 250 was developed for finely adjusting micro objectives and object lenses. The maximum motion is 250 µm. The resolution of the MIPOS 250 is very high, and in practice only limited by the voltage noise of the power supply.

All kinds of standard threads for Zeiss, Leica, Nikon, Olympus etc. are available for the top and bottom sides of the MIPOS system. Mounting this system onto the microscope is very easy – screw the Flex-Adapter thread ring into the microscope and mount the MIPOS 250 for piezo focus fine adjustment on this ring with a screw. Because of the small size, no other threads beside the MIPOS are blocked.

To avoid drift and hysteresis, there is the option of equipping the MIPOS with an integrated strain gauge measurement system “SG”. And, the MIPOS 250 can be used in inverse microscopes – upside down.

To request the Full Datasheet use the button below.  Your requested product(s) will be added to the Contact Form below which you can then submit.

PSJ Mipos objective positioner 400

nanoMIPOS 400

This positioner offers:

  • 400 µm focusing range and sub-nm step size
  • Maximum lens diameter of 39 mm
  • Temperature compensated
  • Short settling time due to high stiffness
  • Optional integrated measurement system

This nanoMIPOS offers a nanopositioning and scanning range up to 400 µm in open-loop operation, as well as 320 µm in closed-loop. The system can be assembled with objectives of up to 39 mm in diameter.

The sophisticated monolithic guidance design, consisting of solid flexure hinges, means the trajectory is free of mechanical play and friction – a feature offered by all piezosystem jena stages.

The advanced nanoMIPOS 400 design is FEA optimized to show an outstanding minimum of lateral and rotational offset, as well as excellent guidance accuracy, while offering robustness against off center and lateral loads.

To avoid drift and hysteresis, the nanoMIPOS 400 can be equipped with a capacitive measurement system. In combination with the piezosystem jena controller, this system offers high stability, linearity, repeatability and accuracy in closed-loop operation.

To request the Full Datasheet use the button below.  Your requested product(s) will be added to the Contact Form below which you then can submit.

Mipos 500 Nanometer positioner

MIPOS 500

This positioner offers:

  • 500 µm focusing range
  • Open-loop 0.9 nm resolution
  • Inverted-use model available
  • Flexible use via Flex-Adapter
  • Optional feedback system

The systems of the MIPOS 500 series offer a nano-positioning and scanning range up to 500 µm in open-loop operation, and 400 µm in closed-loop. They can be assembled with objectives that have a diameter of up to 40 mm.

Parallelogram design guarantees high parallel motion without influencing the optical path. The precise positioning repeatability of the MIPOS 500 series can be guaranteed by the use of the optional integrated measurement system. The design includes an integrated pre-load of the actuator that offers high resonant frequency and highly parallel motion – and is available in an upside-down version for inverted microscopes.

Due to the unique features of the MIPOS 500 series, fast scanning applications can be accurately realized with the shortest settling times.

To request the Full Datasheet use the button below.  Your requested product(s) will be added to the Contact Form below which you then can submit.

PSJ objective positioiner MIPOS 500

MIPOS 600 SG

This positioner offers:

  • 600 µm focusing range
  • High resonant frequency
  • Integrated SG feedback sensor
  • Flexibility with Flex-Adapters
  • Compact design

The MIPOS 600 SG offers a nanopositioning and scanning range up to 600 µm in open-loop operation, and 500 µm in closed-loop using a strain-gauge sensor. It can be used with objectives that have a diameter of up to 40 mm.

Unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 600 SG can be guaranteed by the use of the strain-gauge integrated measurement system. The design which includes an integrated preload of the actuator offers high resonant frequency and highly parallel motion.

Due to the unique features of the MIPOS 600 SG, fast scanning applications can be accurately realized with short settling times.

To request the Full Datasheet use the button below.  Your requested product(s) will be added to the Contact Form below which you then can submit.

PSJ objective positioner Mipos 800

MIPOS 800

This positioner offers:

  • 800 µm focusing range
  • Open-loop resolution of 1 nm
  • Short settling time
  • Highly parallel motion in z-axis
  • Optional feedback system

The MIPOS 800 objective positioner offers a nanopositioning scanning range up to 800 µm in open-loop operation, and 650 µm in closed-loop operation. The positioner can be used with objectives that have a diameter up to 40 mm.

A unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 800 can be guaranteed by the use of the integrated strain-gauge measurement system. The design which includes an integrated preload of the actuator offers high resonant frequency and a highly parallel motion.

Due to the unique design of the MIPOS 800, fast scanning applications can be accurately realized with short settling times.

To request the Full Datasheet use the button below.  Your requested product(s) will be added to the Contact Form below which you then can submit.

Piezo ring stage

MIPOS 16

This positioner offers:

  • 16µm adjustment range (open-loop)
  • Typical step-resolution of .04 nm
  • High stiffness for low settling times
  • Large aperture
  • Load capacity of up to 3 kg

The MIPOS is specifically designed for high precision positioning of optical systems with accuracy in the sub-nanometer range. The high resolution and fast response time of the MIPOS 16 offer new possibilities, especially for white light interferometers.

Based on its unique design, which includes an aperture up to 104 mm and a stage height down to 42 mm, the MIPOS 16 offers technical specifications that match the requirements for white light interferometry. White light interferometry has become one of the most effective 3D surface measurement methods. Piezoelectric actuators are able to significantly improve accuracy and speed due to their virtually unlimited resolution and fast response time. The MIPOS 16 can achieve a focus range of up to 16 µm and a single step resolution of less than 0.1 nm, while operating in a voltage range between 20 and 130 V.

The MIPOS 16 is made for integration into metrology set-ups and devices. The robust drive is equipped with a high resolution piezo based actuating system. The internal mechanical pre-load design enables the MIPOS to operate in highly dynamic environments while reducing the settling time down to microseconds.

To request the Full Datasheet use the button below.  Your requested product(s) will be added to the Contact Form below which you then can submit.

in cooperation with:

Piezosystem Jena (PSJ)

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