Interferometers For Length & Angle Measurement
Single and triple beam laser interferometers are used for precision metrology. Single beam systems can precisely measure displacement. A triple beam interferometer can accurately measure displacement and two angles. These systems offer the highest accuracy and offer easy set-up and adjustment due to integrated beam direction detection functionality.
A calibration laser interferometer can measure simultaneous measurement and calibration of length pitch angle, yaw angle, roll angle and straightness.
Differential laser interferometers are designed for applications where highly stable length measurements are needed over long periods of time. In these interferometers the reference beam is led out of the sensor head and runs parallel to the measuring beam. This concept allows the sensor to be placed at a greater distance from the actual measurement location without significantly affecting the resolution or stability of the measurement. The compact sensor design enables placement even in tight spaces. Measurements up to several meters are easily possible.
Featured Models:
Triple-Beam Laser Interferometer
This versatile measuring system offers simultaneous and highly accurate length, pitch and yaw angle measurements.
- Measurement range available up to 10 m.
- Compact design.
- Various optical reflectors can be used, e.g. spherical, plane mirror reflector.
- Extensive trigger options.
- Sensor head composition is aluminum, stainless steel or invar.
The SP 5000 TR triple beam laser interferometer is designed for precision length measuring and combines the functionality of three interferometers in one device. All three measuring channels are fed by one light source with the same highly stable laser frequency – therefore three length values can be measured simultaneously with nanometer accuracy. And – from the difference in two length values and the calibrated beam distance, the corresponding angle can be determined with high resolution and high precision.
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Sub-set of Datasheet Features
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Model SP 5000 TR
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Single-Beam Laser Interferometer
These systems offer high-precision reliable results with resolution in picometers.
- Measurement range up to 80 m.
- Permissible tilting of the measuring reflector up to ± 12.5°.
- Compact robust design.
- Easy adjustment and handling.
- OEM versions including software are available.
High-precision and reliable results are essential for length measurement and calibration on guides, measuring, microscope and positioning stages, coordinate measuring machines and machine tools as well as for multi-coordinate measurements. The single-beam SP 5000 NG interferometer is the solution for your high-precision length measurement. This model is characterized by easy handling, as well as fast and simple adjustment.
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Sub-set of Datasheet Features
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Model SP 5000 or 15000 NG
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Differential Laser Interferometer
This highly stable system designed for long term measurements, offers precision reliable results with picometer resolution.
- Beam distances apart is 21 mm.
- Thermally long-term stable sensor, temperature sensitivity < 20 nm/K.
- Minimization of environmental influences through differential measurement.
This SP 5000 DI differential interferometer is characterized by unique thermal stability making it ideal for long-term measurements in research and development. In a differential interferometer a reference beam is run out of the sensor head and runs parallel to the measuring beam. This concept allows the sensor to be placed at a greater distance from the actual measurement location without significantly affecting the resolution or stability of the measurement.
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Sub-set of Datasheet Features
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Model SP 5000 DI
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Discover more Precision Measurement products:
in cooperation with:
SIOS Meßtechnik GmbH (SIOS)
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