Gauging Probe Systems

SIOS Gauging probe system

These measurement systems use a tactile probe combined with a laser interferometer to measure length and thickness. They offer a high linearity and a constant probe measuring force over the entire measuring range.  The measurement range is 20 mm, or 50 mm, with a resolution of between 0.1 and 1 nm.

A custom solution based on only laser interferometric measurements (without tactile contact), are also available on request.

These systems are used for quality control, calibration, thickness measurement, and gauge block calibration and inspection.

Featured Systems:

SIOS Gauging Probe System

High Linearity Probe System

  • Laser interferometric precision probe for tactile length/thickness measurements
  • Linearity ≤ ±2 nm
  • Customer determined factory-set measuring force of 0.5 to 1.5 N
  • High linearity over the entire measuring range
  • Constant probe measuring force over the entire measuring range

Gauge Block Calibration System

  • Measuring arrangement with two aligned probes
  • LM 20 laser interferometric probe guarantees high measuring accuracy and linearity
  • Only 15 standard gauge blocks required for the calibration of a 122-piece gauge block set
  • Measurement range: 0.5 mm to 100 mm
  • Resolution: 1 nm
  • Measurement force: 1 N

in cooperation with:

SIOS Meßtechnik GmbH

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