Laser Interferometers For Length & Angle Measurement
Laser interferometers (single and triple beam) are used for precision metrology. Single beam systems can precisely measure displacement. A triple beam interferometer can accurately measure displacement and two angles. These systems offer the highest accuracy and offer easy set-up and adjustment due to integrated beam direction detection functionality.
Calibration laser interferometers can measure simultaneous measurement and calibration of length pitch angle, yaw angle, roll angle and straightness.
Differential laser interferometers are designed for applications where highly stable length measurements are needed over long periods of time. In these interferometers the reference beam is led out of the sensor head and runs parallel to the measuring beam. This concept allows the sensor to be placed at a greater distance from the actual measurement location without significantly affecting the resolution or stability of the measurement. The compact sensor design enables placement even in tight spaces. Measurements up to several meters are easily possible.
Laser interferometers Featured Models are below. Additional models are also available.
Triple-Beam Laser Interferometers
This versatile measuring system offers simultaneous and highly accurate length, pitch and yaw angle measurements.
- Measurement range available up to 10 m.
- Compact design.
- Various optical reflectors can be used, e.g. spherical, plane mirror reflector.
- Extensive trigger options.
- Sensor head composition is aluminum, stainless steel or invar.
The SP 5000 TR triple beam laser interferometer is designed for precision length measuring and combines the functionality of three interferometers in one device. All three measuring channels are fed by one light source with the same highly stable laser frequency – therefore three length values can be measured simultaneously with nanometer accuracy. And – from the difference in two length values and the calibrated beam distance, the corresponding angle can be determined with high resolution and high precision.
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Sub-set of Datasheet Features
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Model SP 5000 TR
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North American Office Contact: Yuri Toegemann, yuri.toegemann@sios.de
C6 Calibration Laser Interferometer
This calibration laser interferometer system is for high-precision simultaneous measurement and calibration of length, pitch angle, yaw angle, roll angle and straightness on positioning axes. The system features:
Flexible highly-accurate length measuring system.
Highly accurate long length measurements.
Synchronous, continuous measurements of length, pitch and yaw angles and straightness.
Up to 6 DoF measurements are possible.
The SP 15000 C6 Ng calibration laser interferometer was specifically engineered to meet the demanding requirements of coordinate measuring machine manufacturers and high‑precision machine tool builders.
Using highly stable laser interferometry, the system measures length, pitch, yaw, and straightness in both the x and y directions with exceptional accuracy. All three length‑measurement channels operate on the same ultra‑stable laser frequency, ensuring consistent and precise results.
The compact design of the straightness optics, and the straightness mirror is directly attached to the sensor head, which allows that only two components have to be assembled and aligned to each other. Even difficult-to-access spaces the measurement system can be quickly installed and reliably adjusted.
With the optional software package, users can perform complete machine acceptance tests or implement full volumetric compensation.
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Sub-set of Datasheet Features
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SP 15000 C6 NG
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North American Office Contact: Yuri Toegemann, yuri.toegemann@sios.de
Single-Beam Laser Interferometers
These systems offer high-precision reliable results with resolution in picometers.
- Measurement range up to 80 m.
- Permissible tilting of the measuring reflector up to ± 12.5°.
- Compact robust design.
- Easy adjustment and handling.
- OEM versions including software are available.
High-precision and reliable results are essential for length measurement and calibration on guides, measuring, microscope and positioning stages, coordinate measuring machines and machine tools as well as for multi-coordinate measurements. The single-beam SP 5000 NG interferometer is the solution for your high-precision length measurement. This model is characterized by easy handling, as well as fast and simple adjustment.
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Sub-set of Datasheet Features
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Model SP 5000 or 15000 NG
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North American Office Contact: Yuri Toegemann, yuri.toegemann@sios.de
Triple Beam Differential Interferometer
This system is ideal for LONG-TERM, highly stable length & angle measurement. The SP 5000 DI/TR is a three-beam interferometer differential model. Ideal applications include:
- Highly stable measuring arrangements – The influence of the dead distance of the measurement is completely eliminated by the differential principle, as is the movement of the sensor relative to the measurement set.
- Long-term stability – The system offers maximum measurement stability, even for measurements that have to be carried out over hours or days.
Laser interferometers that work according to the differential principle are used when particularly high demands are placed on the stability of measured values over long periods of time. The measuring and reference beams are arranged in such a way that the distance between them is minimized.
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Sub-set of Datasheet Features
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Model SP 5000 DI/TR
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North American Office Contact: Yuri Toegemann, yuri.toegemann@sios.de
Differential Laser Interferometers
This highly stable system designed for long term measurements, offers precision reliable results with picometer resolution.
- Beam distances apart is 21 mm.
- Thermally long-term stable sensor, temperature sensitivity < 20 nm/K.
- Minimization of environmental influences through differential measurement.
This SP 5000 DI differential interferometer is characterized by unique thermal stability making it ideal for long-term measurements in research and development. In a differential interferometer a reference beam is run out of the sensor head and runs parallel to the measuring beam. This concept allows the sensor to be placed at a greater distance from the actual measurement location without significantly affecting the resolution or stability of the measurement.
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Sub-set of Datasheet Features
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Model SP 5000 DI
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North American Office Contact: Yuri Toegemann, yuri.toegemann@sios.de
Discover more Precision Measurement products:
in cooperation with:
SIOS Meßtechnik GmbH (SIOS)
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