Multi-Axis Stages & Cross-Tables
Multi-axis stages & cross-tables position components, lasers, lens or cameras in multiple dimensions quickly and precisely. With repeatable micron to nanometer accuracy process time can be dramatically reduced for significant cost savings.
These multi-axis systems use a variety of motion and drive technologies, and are often used for wafer inspection, pick & place operations, laser cutting, dispensing liquids, inspecting components, and marking.
The NEW 3-axis wafer-stage with yaw correction (pictured) is ideal for multiple process steps in semiconductor manufacturing when nanometer resolution is required.
Industries and applications for these multi-axis systems often include semiconductor, medical device, PCB board, automotive and aerospace component manufacturing.
Multi-Axis Featured Systems:
NEW 3-Axis Air-Bearing Wafer Stage w/Yaw Correction
This patent pending multi-axis stage is designed for semiconductor manufacturing and advanced packaging.
- Can be integrated with a laser interferometer or piezo nanopositioner for sub-nm focusing or measurement.
- 200+ mm travel in X and Y with 0.1 µm repeatability.
- High-stability rotary axis (±0.1˚) with 1-µrad resolution.
- Stable granite base.
The unique yaw correction ability of this multi-axis stage make it ideal for photonics and semiconductor manufacturing applications. This stage can make your rotary stage unnecessary. From lithography, advanced packaging to defect inspection, this stage has the precision motion to move the component into nanometer-scale position.
The Z-axis (when mounted to the Y-axis) can accomodate a piezo objective positioner for nanometer focusing.
NEW Thermally Stable BDM Air-Bearing Stage
The system is based on two or more air-bearing support wings arranged in a Cross, T, or L configuration. Their centerlines intersect at a central point—the Tool Center Point (TCP)—where an optical component (e.g., a lens) or a tool (such as a pick tool or diamond turning tool) is mounted. This geometry creates a stable, thermally decoupled guidance structure in which the position of the TCP remains constant even under temperature changes—a decisive advantage over conventional linear guides.
Frictionless Motion with Maximum Accuracy – The support wings are supported on both sides by air- bearings. Their preload is designed so the air gap always remains larger than the maximum possible thermal expansion in the direction of the gap. This ensures frictionless and hysteresis-free motion while maintaining maximum stiffness.
This system enables precise linear movements with extremely high repeatability and dynamic performance—ideal for high-speed processes that demand sub-micrometer accuracy.
Thermally Stable Precision Technology – The key advantage lies in the complete stabilization of the Tool Center Point (TCP) against thermal effects. While conventional systems suffer from positional drift caused by temperature variations, the tool position in this design remains unchanged.
This ensures process reliability, reduces calibration effort, and offers greater flexibility in motor selection—especially for applications subject to varying thermal conditions. Depending on the configuration, this set-up can accommodate temperature differences of more than 40 Kelvin (-387 Fahrenheit).
Linear Motor Cross-Table
This cross-table is capable of moving workpieces up to 30 kg in X and Y axes using its robust iron-core linear drives. This system is ideal for:
- Laser cutting with precision contours
- Dispensing liquid
- Marking and component inspection
This system uses high-resolution optical encoders that lock positions in place, so every scan line lands exactly where your tool path intends. The system delivers high accuracy and reproducibility in both X and Y motion. Ball-chain rail guides and internal energy chains deliver smooth motion and clean routing. The system has a compact footprint with a horizontal mounting orientation.
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Spindle Axis Cross-Table
Dynamic manufacturing work areas are often space restricted. A low-profile cross-table that is accurate within microns is ideal for many of these types of environments and applications. This table features:
- Load handling to 15 kg
- Position resolution to ±1 µm
- Maximum stroke 490 mm x 440 mm
- Rigid ball-screw drives cut backlash
This cross-table uses precision ball-screw 15 x 20 drives for high absolute accuracy. Servo motors supply high dynamics and smooth reversals. Ball-chain rail guides absorb side loads and ensure straight travel. Pre-assembled cables and plug-in connectors simply wiring.
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FAST 4 PnP Air-Bearing Gantry
This carbon fiber reinforced plastic (CFRP) gantry and drive system is light and strong which is ideal for sturdy fast movement.
- Air-bearing guidance system delivers virtually vibration-free motion.
- Suitable for 24/7 operation.
- X-axis stroke is up to 400 mm.
- Y-axis stroke is up to 600 mm.
- Granite base ensures stability.
Micro-electronics manufacturing needs motion platforms that combine extreme precision with dynamic operation. The FAST 4 PnP air-bearing gantry meets that challenge, delivering a super-fast, ±0.1 µm repeatable pick & place ability across a 400 x 600 mm workspace. The large granite base provides low thermal expansion and strong vibration dampening which is key to nano-scale precision.
The friction-free CFRP axis glides on air-bearings. And thanks to its high strength-to-weight ratio (it’s 40% lighter than aluminum), the axis accelerates at 100 m/s² (75 m/s² with a 1 kg load) while remaining virtually maintenance free.
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3-Axis Gantry System
This gantry is available in a variety of configurations and can be combined with other motion and measurement systems. It is ideal for:
- Pick & Place work
- Focusing and cutting
- Dispensing and marking
- Component/product inspection
This gantry is designed for quick, precise positioning of items up to 14 kg. It is comprised of an aluminum bridge, direct-drive linear motors and coordinated servo-drive synchronization for smooth-axis motion.
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Microscopy Precision Cross-Table
This xy stage is designed for microscopy processes in the lab or in industry. The complete system is easily integrated into various applications such as:
- Semiconductor Tests
- Super-resolution Microscopy
- Light Disc Microscopy
- 3D Imaging
- Screening
The aluminum frame of this stage enables high precision operation while staying cost-efficient. Precision spindles move the stage on recirculating ball bearing guides with a repeatability of ±10 μm.
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To request more details on this precision microscopy cross-table use the button below. Your request will be added to the Contact Form below which you then can submit.
Discover Additional Long Travel Products:
in cooperation with:
Jenaer Antriebstechnik (JAT)
Do you need more information? Would you like to speak with an application engineer? Contact us here.
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