1 to 5 Axis Nanopositioning Stages
Piezo stages can precisely position samples or other objects in 1, 2, 3 or 5 axes. Models include both open-loop operation and closed-loop (position feedback system) operation.
These piezo stages can be combined with other short or long travel mechanical positioning systems, and they are well suited for various applications varying from optical research to OEM systems. Vacuum compatible models are available.
Example Models:
5-Axis PENTOR Stages
Optical stages often require an open aperture for passing light through. The PENTOR translation and tilting piezo stage was developed with these features in mind.
- PENTOR models combine 3-axis movement with a 2-axis tilting system
- Center aperture of 17 mm diameter
- Motion is up to 100 µm in x, y & z
- A tilt of ±2 mrad is available on two orthogonal axes
Flexure hinges for the three translation axes guarantee the highest degree of parallelism over the travel range of this stage. Each axis has a integrated mechanical preload, making the 5-axis piezo positioner PENTOR, very well suited for dynamic applications. The tilting is designed for plus-minus tilting.
The construction is temperature compensated so that changes in the surrounding temperature do not affect the tilting angle.
The primary components constructed with solid state flexure hinges are made from stainless steel. The bottom and top plates are made from black anodized aluminum.
As an option, the 5-axis PENTOR piezo stage can be outfitted with an integrated strain gauge measurement system.
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Sub-set of Datasheet Features
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UNIT
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PENTOR
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PENTOR SG
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To request the Full Datasheet use the button below. Your requested product(s) will be added to the Contact Form below which you then can submit.
3-Axis TRITOR Stages
TRITOR® nanopositioners are extremely compact. Parallel motion is achieved without mechanical play due to the system’s rigid design. As an option, integrated position control systems for overcoming the effect of hysteresis are available.
- Motion up to 400 µm in all 3 axes
- Flexure hinge design that operate without mechanical play
- Highest positioning resolution
These piezo stages can be easily combined with other mechanical positioning systems, and they are well suited for various applications reaching from optical research to OEM systems.
TRITOR® elements consist of actuators integrated in a housing with internal lever transmission. Since the lever mechanism works in both directions, forces between the housing and top plate need to be avoided, as they could damage the stage. Some models contain an aperture (pictured).
These multi-axis positioning stages are attached by using two diagonal holes.
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Sub-set of Datasheet Features
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UNIT
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TRITOR 100 SG
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TRITOR 101 SG
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To request the Full Datasheet use the button below. Your requested product(s) will be added to the Contact Form below which you then can submit.
2-Axis Stages
These 2-axis piezo stages offer the ability to precisely position samples or other objects in both X and Y directions.
- Motion up to 400 µm
- High resonant frequency
- Sub-nm resolution is available
- nanoSXY stages
- Offer very high stiffness
Special versions are available for use in vacuum or cryogenic conditions, as well as designs with center apertures to allow the passage of light through the stage for photonic applications.
These stages are often used for applications in microscopy, material research, nano-positioning and semiconductor test equipment where precise nanometer movement in two axes is crucial. There are stages with apertures for lasers and viewing, and stages that optionally include closed-loop positioning sensors.
Some stages optionally include a preload for dynamic movement. These piezo stages do not generate magnetic fields. Multiple models are available. Two of them are featured below.
To request the Full Datasheet use the button below. Your requested product(s) will be added to the Contact Form below which you then can submit.
1-Axis Stages
One axis piezo stages offer the ability to precisely position samples or other objects in one direction. Special versions are available for use in vacuum or cryogenic conditions, as well as designs for easy integration into larger OEM assemblies.
- Motion up to 1500 µm
- Vertical or horizontal movement
- High resonant frequency
- Sub-nm resolution is available
There are stages with apertures for lasers and viewing, and stages that are very small and optionally include closed loop positioning sensors for precise control.
The MIPOS objective positioners are also 1-axis (z-axis) solutions, ideal for some applications.
These piezo stages do not generate magnetic fields. Some stages optionally include a pre-load for dynamic movement. Typical industries include: semiconductor, microbiology, aerospace, photonics and other sectors where precise nm movement in a single axis is crucial.
Several different models are available. Two sample stages are detailed below.
To request the Full Datasheet use the button below. Your requested product(s) will be added to the Contact Form below which you then can submit.
Recommended Controllers for 1 to 5 Axis Stages
For each stage axis a channel of amplification is needed.
For 1-Axis Stages, the NV200D controller is recommended. The NV200D controller offers:
- 1-channel of control amplification
- PiSoWorks software for complete piezo control
- Ethernet connection for remote control
- USB-C Interface
- Real time SPI interface
- Analog interface
- Trigger I/O
- 400 mA peak current
For 2-Axis Stages, two NV200D controllers can be used – one for each axis. Or, a single multi-channel dDrive digital controller is recommended. The dDrive controller offers:
- Digital controller system
- 20-bit resolution
- ASI (Automatic Sensor Identification)
- 19-inch rack casing
- Modular for up to 6 channels
- USB & RS232 interfaces
For 3-Axis Stages, a dDrive digital controller, or a NV 40/3 digital controller is recommended. The NV 40/3 controller offers:
- Dimmable TFT display
- 40 mA permanent output current per channel
- Low noise output signal
- USB 2.0 and RS232 interfaces
- Analog input and output signals
For 5-Axis Stages, a multi-channel dDrive digital controller is recommended (as described above).
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