Example Applications

Leveraging Broad Experience for Holistic Solutions

The advantage of the Precisioneers Group lies in our vast experience gathered over countless different applications over 20+ years. By combining our knowledge across motion technology, measurement technology, and vision technology, we provide holistic solutions tailored to various industries. As science and industry demands greater precision, the components supporting them must also achieve higher levels of accuracy. Below are example applications of Motion technology, Measurement technology, and Vision technology as they are frequently used across various industries.

Semiconductor Manufacturing

MOTION

A variety of piezo components are often used in this industry to improve inspection resolution, repeatability and increase speed. The processes include: wafer slice & dice, photolithography mask inspection, electron-beam inspection, advanced packaging inspection, wafer positioning, device positioning, chemical vapor deposition valve actuation, advanced packaging non-destructive cleaning of water and device surfaces, and advanced packaging wire bonding. Piezo-driven stages can be used in ultra-high vacuum, in a wide range of temperature conditions and have no magnetic interference, while reproducing repeatable motions at the nanometer level without wear and tear.

MEASUREMENT

Interferometers are essential in semiconductor development and manufacturing for their precision and accuracy. They measure wafer surface topography and thickness, ensuring flatness and quality. In lithography, interferometers align masks and wafers and monitor focus for accurate pattern transfer. They also provide real-time monitoring and endpoint detection for etching and deposition processes, maintaining uniformity and preventing defects. Interferometers are also used for overlay metrology, vibration analysis, and stress measurement, ensuring the stability and reliability of semiconductor devices.

For precise measurements and calibration tasks laser interferometers are often used to calibrate piezo components and other motion technology, such as linear drives, voice coils and air-bearings at the nanometer level.

VISION

Telecentric lenses are used in semiconductor research and manufacturing to ensure consistent image magnification across varying object distances, critical for precise measurement and inspection tasks. They eliminate parallax error, providing accurate dimensional measurements of microscopic features on wafers. Telecentric lenses also enhance the accuracy of alignment and overlay processes in photolithography by maintaining a uniform image scale and reducing distortion.

Common uses of vision components include Blue light inspection of wafers and equipment with telecentric lenses to remove edge concealment. The use of widefield telecentric imaging in inspection can significantly reduce processing time.

Photonics

MOTION

High precision piezo stages are used in photonic applications for tasks requiring nanometer-level positioning accuracy, such as laser beam steering, optical alignment, and microscopy. Their superiority comes from the ability to provide ultra-fine, rapid, and repeatable movements with minimal hysteresis and drift. Piezo stages also operate without mechanical wear and offer high stiffness and stability, making them ideal for the demanding precision required in photonics. The small form factor allows for the development of an optical holder and mirrors that can be used in small set-ups. This reduces the footprint of machines and enables mobile optical systems.

MEASUREMENT

Interferometers are used in photonic applications for precise measurements of wavelengths, optical path differences, and surface profiles, essential in calibrating and characterizing optical components and systems. The advantages lie in their ability to achieve extremely high resolution and accuracy by utilizing the interference of light waves. Interferometers can also measure minute displacements and refractive index changes, making them indispensable for advanced photonic research and development. Triple and multi-beam laser interferometers can be used to ensure straightness over a single run, by measuring pitch and roll synchronously.

VISION

Telecentric lenses are often used for non-contact optical metrology by ensuring consistent magnification while eliminating any parallax errors, crucial for accurate measurement and imaging of microscopic features. Blue light, with its shorter wavelength, provides higher resolution and better contrast in imaging systems. Combined, telecentric lenses and blue light offer superior accuracy and clarity in photonic applications, outperforming other technologies in precision and detail.

Materials Testing

MOTION

High power (1000V) piezo actuators from hpower are used in material testing to apply precise, high-force, and high-speed deformations to test material properties under dynamic conditions. They provide ultra-fine control over displacement and force, enabling detailed analysis of material behavior, such as stress-strain relationships and fatigue testing. The advantages of using these actuators include their rapid response time, high resolution, and ability to deliver consistent and repeatable results, making them ideal for advanced material testing applications. High acceleration piezo shock actuators are often used for impact generation testing or modeling, where as piezo shakers are often used for vibration testing over extended times.

MEASUREMENT

Interferometers are used in material testing to measure surface deformations, thickness variations, and internal stress distributions on microstructures. They offer the advantage of non-contact measurement, ensuring that the material’s properties are not altered during testing. Additionally, interferometers provide extremely high resolution and accuracy, allowing for detailed analysis of changes and ensuring reliable data for evaluating material performance. Vibration measurement of geological features is another application. Interferometers are also often used for the repeatable calibration of accelerometers and strain sensors.

VISION

Telecentric lenses and blue light are used in material testing to achieve precise, high-resolution imaging of material surfaces and internal structures. Telecentric lenses provide consistent magnification for accurate dimensional measurements. Blue light, with its shorter wavelength enhances image resolution and contrast. This delivers superior clarity and detail compared to other lighting technologies, making it ideal for detecting fine features and defects in materials. By combining vision lighting and telecentric lenses users can see material changes as they are being tested. Temperature measurements can be aided by using telecentric lenses. And vision components can be utilized for multimodal optical metrology.

1 Cabot Road, Suite 240B

Hudson, MA 01749

1-508-634-6688, 1-774-804-3505

[email protected]