# Multi-Axis Stages & Cross-Tables

- Published: 2025-07-01
- Updated: 2026-09-09
- Author: aktd-om
- Source: https://precisioneersgroup.com/multi-axis-stages-cross-tables/

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# Multi-Axis Stages & Cross-Tables

![multi-axis semiconductor manufacturing 3-axis wafer inspection stage](https://precisioneersgroup.com/wp-content/uploads/2025/11/JATDemo-Stage-Rendering-500x428-1.webp)

Multi-axis stages & cross-tables position components, lasers, lens or cameras in multiple dimensions quickly and precisely.  With repeatable micron to nanometer accuracy process time can be dramatically reduced for significant cost savings.

These multi-axis systems use a variety of motion and drive technologies, and are often used for wafer inspection, pick & place operations, laser cutting, dispensing liquids, inspecting components, and marking.

The NEW 3-axis wafer-stage with yaw correction (pictured) is ideal for multiple process steps in semiconductor manufacturing when nanometer resolution is required.

Many of these multi-axis stages use amplifiers that are CANopen and EtherCAT compatible.  [Click here to learn more about precision long & short travel integrated systems that use EtherCAT.](https://precisioneersgroup.com/nanometer-positioning-solutions/)**Two example EtherCAT compatible servo amplifiers are detailed at the bottom of this page.**

Industries and applications for these multi-axis systems often include semiconductor, medical device, PCB board, automotive and aerospace component manufacturing.

## Multi-Axis Featured Systems are below.  Additional Models & custom systems are available.

![multi-axis wafer stage with yaw correction](https://precisioneersgroup.com/wp-content/uploads/2025/11/Air-Bearing-Wafer-Stage-Yaw-Correction-1000x612-1.jpg)

**NEW 3-Axis Air-Bearing Wafer Stage w/Yaw Correction**

This patent pending multi-axis stage is designed for semiconductor manufacturing and advanced packaging.

- Can be integrated with a laser interferometer or piezo nanopositioner for sub-nm focusing or measurement.
- 200+ mm travel in X and Y with 0.1 µm repeatability.
- High-stability rotary axis (±0.1˚) with 1-µrad resolution.
- Stable granite base.

The unique yaw correction ability of this multi-axis stage make it ideal for photonics and semiconductor manufacturing applications. This stage can make your rotary stage unnecessary. From lithography, advanced packaging to defect inspection, this stage has the precision motion to move the component into nanometer-scale position.

| Sub-set of Datasheet Features | X-axis | Y-axis | Rotating axis |
| --- | --- | --- | --- |
| [Stroke](https://royal-elementor-addons.com/) | [200 mm](https://royal-elementor-addons.com/) | [200 mm](https://royal-elementor-addons.com/) | [±0.1˚](https://royal-elementor-addons.com/) |
| [Resolution](https://royal-elementor-addons.com/) | [0.01 µm](https://royal-elementor-addons.com/) | [0.01 µm](https://royal-elementor-addons.com/) | [±0.1 µrad](https://royal-elementor-addons.com/) |
| [Repeatability](https://royal-elementor-addons.com/) | [0.1 µm](https://royal-elementor-addons.com/) | [0.1 µm](https://royal-elementor-addons.com/) | [±1 µrad](https://royal-elementor-addons.com/) |
| [Velocity](https://royal-elementor-addons.com/) | [80 mm/s](https://royal-elementor-addons.com/) | [80 mm/s](https://royal-elementor-addons.com/) | [--](https://royal-elementor-addons.com/) |
| [Acceleration](https://royal-elementor-addons.com/) | [2 m/s²](https://royal-elementor-addons.com/) | [2 m/s²](https://royal-elementor-addons.com/) | [--](https://royal-elementor-addons.com/) |

The Z-axis (when mounted to the Y-axis) can accomodate a piezo objective positioner for nanometer focusing.

[Request More Information on the Multi-Axis Wafer Stage](#contact)

															![Patented dual center point air bearing mechanism with directional expansion arrows.](https://precisioneersgroup.com/wp-content/uploads/2026/03/BDM-600x503-1.webp)

**NEW Thermally Stable BDM Air-Bearing Stage**

The system is based on two or more air-bearing support wings arranged in a Cross, T, or L configuration. Their centerlines intersect at a central point—the Tool Center Point (TCP)—where an optical component (e.g., a lens) or a tool (such as a pick tool or diamond turning tool) is mounted.  This geometry creates a stable, thermally decoupled guidance structure in which the position of the TCP remains constant even under temperature changes—a decisive advantage over conventional linear guides.

**Frictionless Motion with Maximum Accuracy -**The support wings are supported on both sides by air- bearings. Their preload is designed so the air gap always remains larger than the maximum possible thermal expansion in the direction of the gap. This ensures frictionless and hysteresis-free motion while maintaining maximum stiffness.

This system enables precise linear movements with extremely high repeatability and dynamic performance—ideal for high-speed processes that demand sub-micrometer accuracy.

**Thermally Stable Precision Technology** - The key advantage lies in the complete stabilization of the Tool Center Point (TCP) against thermal effects. While conventional systems suffer from positional drift caused by temperature variations, the tool position in this design remains unchanged.

This ensures process reliability, reduces calibration effort, and offers greater flexibility in motor selection—especially for applications subject to varying thermal conditions. Depending on the configuration, this set-up can accommodate temperature differences of more than 40 Kelvin (-387 Fahrenheit).

[Request More Information on the BDM Air-Bearing Stage](#contact)

															![ultra precision multi axis stage](https://precisioneersgroup.com/wp-content/uploads/2026/03/Ultra-Precision-Stage-600x440-L75.webp)

**Ultra-Precision 5-Axis Stage**

This system delivers 1 nm positioning resolution and 50 nm repeatability.  The mechanics are built onto a granite base and utilizes friction-free air-bearings.  Additional features include:

- Five synchronized axes
- Tilt & shift axes
- Ideal for optics and wafer handling

The stage platform for this system is free from vibration and thermal expansion, which is ideal for semiconductor processing tasks.  This system offers near virtual continuous operation, with minimal required maintenance.  A pre-assembled cable set cut to required length with plug-in connectors.

| Sub-set of Datasheet Features | X-axes | Y-axes | Z-axes |
| --- | --- | --- | --- |
| [Stroke](https://royal-elementor-addons.com/) | [Up to 500 mm](https://royal-elementor-addons.com/) | [Up to 1,500 mm](https://royal-elementor-addons.com/) | [Up to 10 mm](https://royal-elementor-addons.com/) |
| [Positioning Resolution](https://royal-elementor-addons.com/) | [1 nm](https://royal-elementor-addons.com/) | [1 nm](https://royal-elementor-addons.com/) | [1 nm](https://royal-elementor-addons.com/) |
| [Reproducibility](https://royal-elementor-addons.com/) | [50 nm](https://royal-elementor-addons.com/) | [50 nm](https://royal-elementor-addons.com/) | [50 nm](https://royal-elementor-addons.com/) |
| [Maximum Velocity](https://royal-elementor-addons.com/) | [1,000 mm/s](https://royal-elementor-addons.com/) | [1,000 mm/s](https://royal-elementor-addons.com/) | [10 mm/s](https://royal-elementor-addons.com/) |
| [Maximum Acceleration](https://royal-elementor-addons.com/) | [5 m/s²](https://royal-elementor-addons.com/) | [5 m/s²](https://royal-elementor-addons.com/) | [0.5 m/s²](https://royal-elementor-addons.com/) |

[Request More Information on the Ultra-Precision 5-Axis Stage](#contact)

															![Two metallic linear motor stages with rectangular frames and mounting holes on a white background.](https://precisioneersgroup.com/wp-content/uploads/2026/03/Cross-Table-Linear-Motor-600x422-1.webp)

**Linear Motor Cross-Table**

This cross-table is capable of moving workpieces up to 30 kg in X and Y axes using its robust iron-core linear drives.  This system is ideal for:

- Laser cutting with precision contours
- Dispensing liquid
- Marking and component inspection

This system uses high-resolution optical encoders that lock positions in place, so every scan line lands exactly where your tool path intends.  The system delivers high accuracy and reproducibility in both X and Y motion.  Ball-chain rail guides and internal energy chains deliver smooth motion and clean routing. The system has a compact footprint with a horizontal mounting orientation.

| Sub-set of Technical Features | Performance |
| --- | --- |
| [Maximum Velocity](https://royal-elementor-addons.com/) | [0.5 m/s](https://royal-elementor-addons.com/) |
| [Maximum Acceleration](https://royal-elementor-addons.com/) | [5.0 m/s² (with a 30 kg load)](https://royal-elementor-addons.com/) |
| [Repeatability (height/side)](https://royal-elementor-addons.com/) | [±20 µm / ±5 µm](https://royal-elementor-addons.com/) |
| [Reproducibility](https://royal-elementor-addons.com/) | [0.2 µm](https://royal-elementor-addons.com/) |
| [Load Capacity](https://royal-elementor-addons.com/) | [30 kg](https://royal-elementor-addons.com/) |

[Request Datasheet for Linear Motor Cross-Table](#contact)

															![Metal cross table assembly with linear rails and motorized spindle axis components on white background](https://precisioneersgroup.com/wp-content/uploads/2026/03/Spindle-Axis-Cross-Table-600x424-1.jpg)

**Spindle Axis Cross-Table**

Dynamic manufacturing work areas are often space restricted.  A low-profile cross-table that is accurate within microns is ideal for many of these types of environments and applications.  This table features:

- Load handling to 15 kg
- Position resolution to ±1 µm
- Maximum stroke 490 mm x 440 mm
- Rigid ball-screw drives cut backlash

This cross-table uses precision ball-screw 15 x 20 drives for high absolute accuracy.  Servo motors supply high dynamics and smooth reversals.  Ball-chain rail guides absorb side loads and ensure straight travel.  Pre-assembled cables and plug-in connectors simply wiring.

| Sub-set of Technical Features | Performance |
| --- | --- |
| [Maximum Velocity in X and Y](https://royal-elementor-addons.com/) | [0.5 m/s](https://royal-elementor-addons.com/) |
| [Maximum Acceleration (with a 15 kg load)](https://royal-elementor-addons.com/) | [6.0 m/s² in X, and 8.0 m/s² in Y](https://royal-elementor-addons.com/) |
| [Repeatability (height/side)](https://royal-elementor-addons.com/) | [±0.1 mm](https://royal-elementor-addons.com/) |
| [Reproducibility](https://royal-elementor-addons.com/) | [2.0 µm](https://royal-elementor-addons.com/) |
| [Load Capacity](https://royal-elementor-addons.com/) | [15 kg](https://royal-elementor-addons.com/) |

[Request Datasheet for Spindle Axis Cross-Table](#contact)

															![large gantry system using air bearings](https://precisioneersgroup.com/wp-content/uploads/elementor/thumbs/Air-bearing-gantry-system-600x686-1-rewby70excr23u6sfqlsefs39pbilz297ej7y1em0w.webp)

**FAST 4 PnP Air-Bearing Gantry**

This carbon fiber reinforced plastic (CFRP) gantry and drive system is light and strong which is ideal for sturdy fast movement.

- Air-bearing guidance system delivers virtually vibration-free motion.
- Suitable for 24/7 operation.
- X-axis stroke is up to 400 mm.
- Y-axis stroke is up to 600 mm.
- Granite base ensures stability.

Micro-electronics manufacturing needs motion platforms that combine extreme precision with dynamic operation. The FAST 4 PnP air-bearing gantry meets that challenge, delivering a super-fast, ±0.1 µm repeatable pick & place ability across a 400 x 600 mm workspace. The large granite base provides low thermal expansion and strong vibration dampening which is key to nano-scale precision.

The friction-free CFRP axis glides on air-bearings.  And thanks to its high strength-to-weight ratio (it's 40% lighter than aluminum), the axis accelerates at 100 m/s² (75 m/s² with a 1 kg load) while remaining virtually maintenance free.

| Sub-set of Datasheet Features | X-axis | Y-axis |
| --- | --- | --- |
| [Effective Stroke](https://royal-elementor-addons.com/) | [400 mm](https://royal-elementor-addons.com/) | [600 mm](https://royal-elementor-addons.com/) |
| [Maximum Acceleration](https://royal-elementor-addons.com/) | [100 m/s² (75 m/s² @ 1kg)](https://royal-elementor-addons.com/) | [152 m/s² (1 kg load)](https://royal-elementor-addons.com/) |
| [Acceleration (continuous, without load)](https://royal-elementor-addons.com/) | [±0.1 µm](https://royal-elementor-addons.com/) | [±0.1 µm](https://royal-elementor-addons.com/) |
| [Straightness](https://royal-elementor-addons.com/) | [< 3 µm](https://royal-elementor-addons.com/) | [< 3 µm](https://royal-elementor-addons.com/) |

[Request Full Datasheet for FAST 4 PnP Air-Bearing Gantry](#contact)

															![Gray industrial 3-axis gantry system with linear rails and cable chains on a white background.](https://precisioneersgroup.com/wp-content/uploads/2026/03/3-axis-gantry-system-600x430-1.webp)

**3-Axis Gantry System**

This gantry is available in a variety of configurations and can be combined with other motion and measurement systems. It is ideal for:

- Pick & Place work
- Focusing and cutting
- Dispensing and marking
- Component/product inspection

This gantry is designed for quick, precise positioning of items up to 14 kg.  It is comprised of an aluminum bridge, direct-drive linear motors and coordinated servo-drive synchronization for smooth-axis motion.

| Sub-set of Technical Features | Performance |
| --- | --- |
| [Velocity](https://royal-elementor-addons.com/) | [2.0 m/s](https://royal-elementor-addons.com/) |
| [Acceleration](https://royal-elementor-addons.com/) | [10.0 m/s²](https://royal-elementor-addons.com/) |
| [Repeatability](https://royal-elementor-addons.com/) | [<±40 µm](https://royal-elementor-addons.com/) |
| [Reproducibility](https://royal-elementor-addons.com/) | [±10 µm](https://royal-elementor-addons.com/) |
| [Load Capacity](https://royal-elementor-addons.com/) | [14 kg](https://royal-elementor-addons.com/) |

[Request Datasheet for 3-Axis Gantry System](#contact)

															![Microscopy Stages CSM from JAT](https://precisioneersgroup.com/wp-content/uploads/elementor/thumbs/JAT-Microscopy-Stage-csm_durchlichttsich-jat_6c17c7a498-r84tx2ku4bgl3bkf6shm2852o0si19rbdnyqxrzavg.png)

**Microscopy Precision Cross-Table**

This xy stage is designed for microscopy processes in the lab or in industry. The complete system is easily integrated into various applications such as:

- Semiconductor Tests
- Super-resolution Microscopy
- Light Disc Microscopy
- 3D Imaging
- Screening

The aluminum frame of this stage enables high precision operation while staying cost-efficient. Precision spindles move the stage on recirculating ball bearing guides with a repeatability of ±10 μm.

| Sub-set of Technical Features | Performance |
| --- | --- |
| [Velocity](https://royal-elementor-addons.com/) | [0.03 m/s](https://royal-elementor-addons.com/) |
| [Acceleration](https://royal-elementor-addons.com/) | [0.15 m/s²](https://royal-elementor-addons.com/) |
| [Positioning Accuracy](https://royal-elementor-addons.com/) | [±10 µm](https://royal-elementor-addons.com/) |
| [Positioning Resolution](https://royal-elementor-addons.com/) | [50 nm](https://royal-elementor-addons.com/) |
| [Repeatability](https://royal-elementor-addons.com/) | [<1 µm](https://royal-elementor-addons.com/) |
| [Tracking Accuracy](https://royal-elementor-addons.com/) | [250 nm](https://royal-elementor-addons.com/) |

To request more details on this precision microscopy cross-table use the button below. Your request will be added to the Contact Form below which you then can submit.

[Request Full Datasheet for the Microscopy Precision Cross-Table](#contact)

															![Orange and black industrial electronic module with green terminal connectors on the side](https://precisioneersgroup.com/wp-content/uploads/2026/06/ECOVARIO-600-2-600x450-1.jpg)

**Example EtherCAT Compatible Servo Amplifiers, ECOVARIO® Models 616A & 616D**

These two 1-axis and 2-axis servo amplifiers are powerful and ideal for dynamic positioning - and they are EtherCAT compatible.  Additional features and benefits include:

- **High Connectivity** - EtherCAT, CANopen, PROFIBUS, PROFINET, Ethernet, RS485 & 232
- **Integrated Safety** - Safe-Torque-Off according to EN 61800-5-2
- **Cost-Effective** - Implemented sequences replace smaller controllers
- **Easy Commissioning** - Intuitive set-up via ECOSTUDIO® engineering software.
- **Diverse Drive Applications** - Numerous technology functions reducing time-consuming programming.

Models 616A and 616D are ideal for high-dynamic handling, feeding and indexing stations.  Often this is for electronics inspection and measurement cells.  Laser, marking and cutting stations will also benefit from fast commissioning and the fieldbus options. **There are many other amplifier and controller options available.**

| Sub-set of Datasheet Features | ECOVARIO® 616A (616D) |
| --- | --- |
| [Axis Control](https://royal-elementor-addons.com/) | [1-Axis (2-Axis)](https://royal-elementor-addons.com/) |
| [Inputs](https://royal-elementor-addons.com/) | [7 digital inputs, and 2 high-speed capture inputs (RS 422) for fast even capturing](https://royal-elementor-addons.com/) |
| [Outputs](https://royal-elementor-addons.com/) | [2 digital outputs](https://royal-elementor-addons.com/) |
| [Power Supply](https://royal-elementor-addons.com/) | [200 ... 528 VAC 3-Phase](https://royal-elementor-addons.com/) |
| [Dimensions (W x H x D)](https://royal-elementor-addons.com/) | [82 x 330 x 225 mm](https://royal-elementor-addons.com/) |
| [Weight](https://royal-elementor-addons.com/) | [4 kg](https://royal-elementor-addons.com/) |

[Datasheet for the ECOVARIO 616A 1-Axis Servo Amp](https://precisioneersgroup.com/wp-content/uploads/2026/06/Datasheet-ECOVARIO-616A.pdf)

					[Datasheet for the ECOVARIO 616D 2-Axis Servo Amp](https://precisioneersgroup.com/wp-content/uploads/2026/06/Datasheet-ECOVARIO-616D.pdf)

**For more details or questions, contact us at:** [Contact@PrecisioneersGroup.com](mailto:Contact@PrecisioneersGroup.com)

### Discover Additional Long Travel Products:

[1-Axis Linear Stages & Actuators](https://precisioneersgroup.com/1-axis-linear-stages-actuators/)

					[Rotary Stages](https://precisioneersgroup.com/rotary-stages/)

### in cooperation with:

[![jat logo](https://precisioneersgroup.com/wp-content/uploads/2025/05/JAT-logo-1.jpg)](/jat/)

**Jenaer Antriebstechnik (JAT)**

## Do you need more information? Would you like to speak with an application engineer? Contact us here.

#### Address

1 Cabot Road, Suite 210

Hudson, MA 01749

#### Call Us

1-508-634-6688

#### Email Us

[Contact@PrecisioneersGroup.com](mailto:Contact@PrecisioneersGroup.com)